@conference{830491, author = {Richard Silver and Bryan Barnes and Nien Zhang and Hui Zhou and Andras Vladar and John Villarrubia and Regis Kline and Daniel Sunday and Alok Vaid}, title = {Optimizing Hybrid Metrology through a Consistent Multi-Tool Parameter Set and Uncertainty Model}, year = {2014}, number = {9050}, month = {2014-04-14 00:04:00}, publisher = {Proceedings of the SPIE, San Jose, CA, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915846}, doi = {https://doi.org/10.1117/12.2048225}, language = {en}, }