Knuffman, B.
, Steele, A.
and McClelland, J.
(2013),
Cold atomic beam ion source for focused ion beam applications, Japanese Journal of Applied Physics, [online], https://doi.org/10.1063/1.4816248 , https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913784
(Accessed June 17, 2025)
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Cold atomic beam ion source for focused ion beam applications
Published
Author(s)
, ,
Abstract
We report measurements and modeling performed on an ion source based on ionization of a laser-cooled atomic beam. We show a high brightness and a low energy spread, suitable for use in next-generation, high-resolution focused ion beam (FIB) systems. Our measurements of total ion current as a function of ionization conditions support a model that also predicts the cross-sectional current density and spatial distribution of ions created in the source. The model predicts a peak brightness of 2×107 Am 2sr 1eV 1 and an energy spread < 0.34 eV. The model is also combined with Monte-Carlo simulations of the inter-ion Coulomb forces to show that the source can be operated at several picoamperes with a brightness above 1×107 Am 2sr 1eV 1. We estimate that when combined with a conventional ion focusing column, an ion source with these properties could focus a 1 pA beam into a spot smaller than 1 nm. A total current greater than 5 nA was measured in a lower-brightness configuration of the ion source, demonstrating the possibility of a high current mode of operation.Citation
Japanese Journal of Applied Physics
Volume
114
Issue
4
Pub Type
Journals
Keywords
focused ion beams, cold atoms, laser cooling
Citation
Issues
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Created July 22, 2013, Updated October 12, 2021