Zang, J.
, Liu, H.
, Briles, T.
and Papp, S.
(2024),
Foundry manufacturing of octave-spanning microcombs, Optics Letters, [online], https://doi.org/10.1364/OL.527540, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957650
(Accessed May 9, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Foundry manufacturing of octave-spanning microcombs
Published
Author(s)
, , ,
Abstract
Soliton microcombs provide a chip-based, octave-spanning source for self-referencing and optical metrology. We use a silicon nitride integrated photonics foundry to manufacture 280 single-chip solutions of octave-spanning microcombs on a wafer. By group-velocity dispersion (GVD) engineering with the waveguide cross section, we shape the soliton spectrum for dispersive-wave spectral enhancements at the frequencies for f-2f self-referencing. Moreover, we demonstrate the other considerations, including models for soliton spectrum design, ultra-broadband resonator external coupling, low-loss edge couplers, and the nonlinear self-interactions of few-cycle solitons. To cover the fabrication tolerance, we systematically scan 336 parameter sets of resonator width and radius, ensuring at least one device on each chip can yield an octave-spanning comb with an electronically detectable carrier-envelope offset frequency, which has been supported by our experiment. Our design and testing process permit highly repeatable creation of single-chip solutions of soliton microcombs optimized for pump operation ∼100 mW and high comb mode power for f-2f detection, which is the central component of a compact microsystem for optical metrology.Citation
Optics Letters
Volume
49
Issue
18
Pub Type
Journals
Keywords
Frequency comb, Microresonator, Self referencing, Foundry, Nonlinear optics
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created September 6, 2024, Updated September 7, 2024